The aims of this paper are to illustrate the meaning and method of comparing industrial land use efficiency in different regions by eliminating the industrial land area differences caused by industrial structures, thus to improve the level of industrial land use efficiency assessment. We select the land use intensity as an effective tool to eliminate the effect of industrial land area differences, and explain method of comparing industrial land use efficiency under the situation of no intensity differences. Then we build a“Volume rate index”(VRI) to reflect the land use intensity differences characterized by industrial output, and use it to calculate the comparable areas of industrial land in different regions, achieving the industrial land comparison with no intensity differences. Finally, in order to grasp the full extents of industrial land use in different regions, we make 30 provinces as macro DMUs to measure the industrial land use efficiency using sub-factor DEA method. The data used includes industrial input and output from 2001 to 2011. The results indicate that industrial land in many provinces has not been fully utilized, and there is a massive waste of industrial land area. The areas which have higher VRI distribute in southeast coastal region, and lower VRI areas generally locate in midwest region. After correction of industrial land area, the provinces whose industrial land use efficiency increase are mainly in the midwest region, and the provinces whose industrial land use efficiency decrease are mainly in the southeast coastal region. The changes of industrial land use efficiency and VRI have a negative correlation. China's industrial development has a significant regional gradient difference, that the industrial land use efficiency in the Yangtze River Delta and Pearl River Delta are significantly higher than that in the central and western regions. The coefficient of variation reflects that the imbalance of industrial output is greater than the imbalance of industrial land configuration among regions, while at the same time it reflects that regional gap of land use efficiency is gradually narrowing.